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                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "AAssALitho",
                "recipeAlias": "Swww6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNssS",
                "tool": "PPILD01",
                "defaultLevel": 1,
                "recipeName": "S6NPW"
            },
            {
                "id": 3259,
                "static": "Meant",
                "chamber": "SC1",
                "cet": "Litho-DNS-RF3",
                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "Litho",
                "recipeAlias": "S6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNS",
                "tool": "PPILD01",
                "defaultLevel": 3,
                "recipeName": "S6NPW"
            },
            {
                "id": 3260,
                "static": "Meant",
                "chamber": "SC1",
                "cet": "Litho-DNS-RF3",
                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "Litho",
                "recipeAlias": "S6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNS",
                "tool": "PPILD01",
                "defaultLevel": 2,
                "recipeName": "S6NPW"
            },
            {
                "id": 3261,
                "static": "Meant",
                "chamber": "SC1",
                "cet": "Litho-DNS-RF3",
                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "Litho",
                "recipeAlias": "S6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNS",
                "tool": "PPILD01",
                "defaultLevel": 1,
                "recipeName": "S6NPW"
            },
            {
                "id": 3262,
                "static": "Meant",
                "chamber": "SC1",
                "cet": "Litho-DNS-RF3",
                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "Litho",
                "recipeAlias": "S6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNS",
                "tool": "PPILD01",
                "defaultLevel": 1,
                "recipeName": "S6NPW"
            },
            {
                "id": 3263,
                "static": "Meant",
                "chamber": "SC1",
                "cet": "Litho-DNS-RF3",
                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "Litho",
                "recipeAlias": "S6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNS",
                "tool": "PPILD01",
                "defaultLevel": 112,
                "recipeName": "S6NPW"
            },
            {
                "id": 3264,
                "static": "Meant",
                "chamber": "SC1",
                "cet": "Litho-DNS-RF3",
                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "Litho",
                "recipeAlias": "S6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNS",
                "tool": "PPILD01",
                "defaultLevel": 12,
                "recipeName": "S6NPW"
            },
            {
                "id": 3265,
                "static": "MAAeant",
                "chamber": "CCCC",
                "cet": "CEE-DNS-RF3",
                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "AAssALitho",
                "recipeAlias": "Swww6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNssS",
                "tool": "PPILD01",
                "defaultLevel": 1,
                "recipeName": "S6NPW"
            },
            {
                "id": 3266,
                "static": "MAAeant",
                "chamber": "CCCssC",
                "cet": "CEE-DNS-RF3",
                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "AAssALitho",
                "recipeAlias": "Swww6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNssS",
                "tool": "PPILD01",
                "defaultLevel": 1,
                "recipeName": "S6NPW"
            },
            {
                "id": 3267,
                "static": "Meant",
                "chamber": "SC1",
                "cet": "Litho-DNS-RF3",
                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "Litho",
                "recipeAlias": "S6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNS",
                "tool": "PPILD01",
                "defaultLevel": 1,
                "recipeName": "S6NPW"
            },
            {
                "id": 3268,
                "static": "Meant",
                "chamber": "SC1",
                "cet": "Litho-DNS-RF3",
                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "Litho",
                "recipeAlias": "S6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNS",
                "tool": "PPILD01",
                "defaultLevel": 1,
                "recipeName": "S6NPW"
            },
            {
                "id": 3269,
                "static": "Meant",
                "chamber": "SC1",
                "cet": "Litho-DNS-RF3",
                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "Litho",
                "recipeAlias": "S6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNS",
                "tool": "PPILD01",
                "defaultLevel": 1,
                "recipeName": "S6NPW"
            },
            {
                "id": 3270,
                "static": "Meant",
                "chamber": "SC1",
                "cet": "Litho-DNS-RF3",
                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "Litho",
                "recipeAlias": "S6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNS",
                "tool": "PPILD01",
                "defaultLevel": 1,
                "recipeName": "S6NPW"
            },
            {
                "id": 3271,
                "static": "MAAeant",
                "chamber": "SC1",
                "cet": "CEE-DNS-RF3",
                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "AAssALitho",
                "recipeAlias": "Swww6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNssS",
                "tool": "PPILD01",
                "defaultLevel": 1,
                "recipeName": "S6NPW"
            },
            {
                "id": 3272,
                "static": "Meant",
                "chamber": "SC1",
                "cet": "Litho-DNS-RF3",
                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "Litho",
                "recipeAlias": "S6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNS",
                "tool": "PPILD01",
                "defaultLevel": 3,
                "recipeName": "S6NPW"
            },
            {
                "id": 3273,
                "static": "Meant",
                "chamber": "SC1",
                "cet": "Litho-DNS-RF3",
                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "Litho",
                "recipeAlias": "S6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNS",
                "tool": "PPILD01",
                "defaultLevel": 2,
                "recipeName": "S6NPW"
            },
            {
                "id": 3274,
                "static": "Meant",
                "chamber": "SC1",
                "cet": "Litho-DNS-RF3",
                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "Litho",
                "recipeAlias": "S6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNS",
                "tool": "PPILD01",
                "defaultLevel": 1,
                "recipeName": "S6NPW"
            },
            {
                "id": 3275,
                "static": "Meant",
                "chamber": "SC1",
                "cet": "Litho-DNS-RF3",
                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "Litho",
                "recipeAlias": "S6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNS",
                "tool": "PPILD01",
                "defaultLevel": 1,
                "recipeName": "S6NPW"
            },
            {
                "id": 3276,
                "static": "Meant",
                "chamber": "SC1",
                "cet": "Litho-DNS-RF3",
                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "Litho",
                "recipeAlias": "S6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNS",
                "tool": "PPILD01",
                "defaultLevel": 112,
                "recipeName": "S6NPW"
            },
            {
                "id": 3277,
                "static": "Meant",
                "chamber": "SC1",
                "cet": "Litho-DNS-RF3",
                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "Litho",
                "recipeAlias": "S6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNS",
                "tool": "PPILD01",
                "defaultLevel": 12,
                "recipeName": "S6NPW"
            },
            {
                "id": 3278,
                "static": "MAAeant",
                "chamber": "CCCC",
                "cet": "CEE-DNS-RF3",
                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "AAssALitho",
                "recipeAlias": "Swww6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNssS",
                "tool": "PPILD01",
                "defaultLevel": 1,
                "recipeName": "S6NPW"
            },
            {
                "id": 3279,
                "static": "MAAeant",
                "chamber": "CCCssC",
                "cet": "CEE-DNS-RF3",
                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "AAssALitho",
                "recipeAlias": "Swww6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNssS",
                "tool": "PPILD01",
                "defaultLevel": 1,
                "recipeName": "S6NPW"
            },
            {
                "id": 3280,
                "static": "Meant",
                "chamber": "SC1",
                "cet": "Litho-DNS-RF3",
                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "Litho",
                "recipeAlias": "S6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNS",
                "tool": "PPILD01",
                "defaultLevel": 1,
                "recipeName": "S6NPW"
            },
            {
                "id": 3281,
                "static": "Meant",
                "chamber": "SC1",
                "cet": "Litho-DNS-RF3",
                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "Litho",
                "recipeAlias": "S6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNS",
                "tool": "PPILD01",
                "defaultLevel": 1,
                "recipeName": "S6NPW"
            },
            {
                "id": 3282,
                "static": "Meant",
                "chamber": "SC1",
                "cet": "Litho-DNS-RF3",
                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "Litho",
                "recipeAlias": "S6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNS",
                "tool": "PPILD01",
                "defaultLevel": 1,
                "recipeName": "S6NPW"
            },
            {
                "id": 3283,
                "static": "Meant",
                "chamber": "SC1",
                "cet": "Litho-DNS-RF3",
                "sensorAlias": "A",
                "filterPlan": "Litho-DNS-RF3-SC-S6PW",
                "recipeWindow": "A-A1",
                "cmt": "SC",
                "department": "Litho",
                "recipeAlias": "S6PW",
                "moduleType": "SC",
                "equipmentType": "Litho-DNS-RF3",
                "goldenSelect": 1,
                "section": "DNS",
                "tool": "PPILD01",
                "defaultLevel": 1,
                "recipeName": "S6NPW"
            }
        ]
    }
}
export default typesetupdata;
